{"624067":{"#nid":"624067","#data":{"type":"event","title":"SENIC Webinar: Elionix ELS-G100 100 kV Electron Beam Lithography System \u2013 Enabling Nanotechnology","body":[{"value":"\u003Ch5\u003EDevin K. Brown- Senior Research Engineer; Institute for Electronics \u0026amp; Nanotechnology, Georgia Institute of Technology\u003C\/h5\u003E\r\n\r\n\u003Cp\u003E\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003EThe Elionix ELS-G100 is a direct write electron beam lithography system that uses a 100 kV acceleration voltage and a 1.8 nm spot Gaussian beam to achieve nanometer scale resolution. The Elionix electron beam lithography tools are known for ultra-high precision to fabricate small nano-structures with excellent reliability. The ELS G-100 is capable of generating patterns with a line width of 5 nm. A 20bit DAC provides high beam positioning resolution. In addition, the laser interferometer with its reading resolution of 0.31 nm enables a stitching accuracy of 15 nm and overlay accuracy of 20 nm. The tool features a maximum field size of 1 mm and a scanning frequency of 100 MHz. Sample sizes can be handled from small millimeter size pieces up to full 8\u0026rdquo; diameter wafers.This 30-minute webinar will provide an overview of the ELS-G100 system with a discussion of key features and capabilities followed by time for Q \u0026amp; A.\u003Cbr \/\u003E\r\n\u003Cbr \/\u003E\r\n\u003Cstrong\u003EWho should attend:\u003C\/strong\u003E Faculty, scientists, engineers, researchers, and technical staff from university, company, or government labs who are interested in learning about how electron beam lithography capability might enable their research efforts.\u003Cbr \/\u003E\r\n\u003Cbr \/\u003E\r\n\u003Ca href=\u0022https:\/\/events.r20.constantcontact.com\/register\/eventReg?oeidk=a07egi78jlkb41731a3\u0026amp;oseq=\u0026amp;c=\u0026amp;ch=\u0022 target=\u0022_blank\u0022\u003EREGISTER FOR THE WEBINAR AT THIS LINK\u003C\/a\u003E\u003C\/p\u003E\r\n","summary":null,"format":"limited_html"}],"field_subtitle":"","field_summary":"","field_summary_sentence":[{"value":"This 30-minute webinar will provide an overview of the ELS-G100 system with a discussion of key features and capabilities followed by time for Q \u0026 A."}],"uid":"27863","created_gmt":"2019-08-07 15:13:07","changed_gmt":"2019-08-07 15:13:07","author":"Christa Ernst","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2019-08-14T14:30:00-04:00","event_time_end":"2019-08-14T15:30:00-04:00","event_time_end_last":"2019-08-14T15:30:00-04:00","gmt_time_start":"2019-08-14 18:30:00","gmt_time_end":"2019-08-14 19:30:00","gmt_time_end_last":"2019-08-14 19:30:00","rrule":null,"timezone":"America\/New_York"},"extras":[],"groups":[{"id":"213791","name":"3D Systems Packaging Research Center"},{"id":"198081","name":"Georgia Electronic Design Center (GEDC)"},{"id":"197261","name":"Institute for Electronics and Nanotechnology"},{"id":"1271","name":"NanoTECH"},{"id":"213771","name":"The Center for MEMS and Microsystems Technologies"}],"categories":[],"keywords":[{"id":"46201","name":"3D Nanolithography"},{"id":"181923","name":"e-beam lithography"},{"id":"4264","name":"fabrication"},{"id":"181924","name":"lab skills Institute for Electronics and Nanotechnology"},{"id":"107","name":"Nanotechnology"},{"id":"1259","name":"electrical engineering"},{"id":"249","name":"Biomedical Engineering"},{"id":"170441","name":"Advanced Semiconductor Manufacturing"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"10377","name":"Career\/Professional development"},{"id":"1795","name":"Seminar\/Lecture\/Colloquium"}],"invited_audience":[{"id":"78761","name":"Faculty\/Staff"},{"id":"177814","name":"Postdoc"},{"id":"78771","name":"Public"},{"id":"174045","name":"Graduate students"},{"id":"78751","name":"Undergraduate students"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"\u003Cdiv\u003EPaul Joseph - External User Coordinator\u003C\/div\u003E\r\n\r\n\u003Cdiv\u003E\r\n\u003Cdiv\u003E\u003Ca href=\u0022mailto:paul.joseph@ien.gatech.edu\u0022\u003Epaul.joseph@ien.gatech.edu\u003C\/a\u003E\u003C\/div\u003E\r\n\u003C\/div\u003E\r\n\r\n\u003Cdiv\u003E404.894.5029\u003C\/div\u003E\r\n","format":"limited_html"}],"email":[],"slides":[],"orientation":[],"userdata":""}}}